"Nanophotonics MicroFabrication System (NMFS)" was developed by Researchers in Technical Institute of Physics and Chemistry (TIPC). A series of great research works were obtained using this system.

    The equipment research project "Nanophotonics MicroFabrication System (NMFS)" from CAS was undertaken by professor Xuanming Duan, who was introduced into Technical Institute of Physics and Chemistry as the leader of laboratory of organic nanophotonics (LaONP). The rapid fabrication of three-dimensional complicated mico/nano structures can be realized on the basis of the nonlinear optical effect of light with substances, by using 800nm femtosecond laser pulse as light source and combining optical microscopy, laser scanning and piezoelectricity. A breakthrough on spatial resolution was achieved, a 15nm-diameter line was fabricated and the fabrication was increase to a range of 500um. The NMFS was started to set in Jan 2005 and finished in Jul 2006. Its fabrication resolution and range reached advanced international level.

    Using NMFS, the researchers in LaNOP have been studying on nanofabrication resolution, rapid fabrication of 3D complicated structure, Intergration of micro/nano mechanics system and photonics micro devices etc. Spatial resolution of 50nm-linewidth was achieved, the average fabrication speed of the NMFS reaches 100um/s, which is 10 times as that from other similar system in the world. At the same time, the integration of multi micromechanics part was realized using multi-focus set-up. Besides these, nanoparticles-hybrid 3D photonic crystals were prepared with tunable reflective index, which band-gap range increases to 380 nm. The bandgap range was tuned in a range of 60nm when photoisomerization polymer was used to make photonic crystal. These results keep ahead in the world. Some groups expressed their cooperation intents.


    2007.5.10